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SCI Article

Hierarchical multi-level block copolymer patterns by multiple self-assembly

	성명	성기훈 ()
	소속	대학원 바이오나노학과
	캠퍼스
	우수선정주	2019년 05월 3째주

Author

성기훈 (Dept Bionano Engn) corresponding author;

Corresponding Author Info

Jung, H; Park, WI (reprint author), KICET, Elect Convergence Mat Div, 101 Soho Ro, Jinju 52851, South Korea.; Kim, KH (reprint author), PNU, Dept Mat Sci & Engn, Pusan 46241, South Korea.; Seong, GH (reprint author), Hanyang Univ, Dept Bionano Engn, Ansan

E-mail

ghseong@hanyang.ac.kr

Document Type

Article

Source

NANOSCALE Volume:11 Issue:17 Pages:8433-8441 Published:2019

Times Cited

External Information

http://dx.doi.org/10.1039/c9nr00774a

Abstract

Uniform, well-ordered sub-20 nm patterns can be generated by the templated self-assembly of block copolymers (BCPs) with a high Flory-Huggins interaction parameter (). However, the self-assembled BCP monolayers remain limited in the possible structural geometries. Here, we introduce a multiple self-assembly method which uses di-BCPs to produce diverse morphologies, such as dot, dot-in-honeycomb, line-on-dot, double-dot, pondering, dot-in-pondering, and line-on-pondering patterns. To improve the diversity of BCP morphological structures, we employed sphere-forming and cylinder-forming poly(styrene-block-dimethylsiloxane) (PS-b-PDMS) BCPs with a high . The self-assembled mono-layer and double-layer SiOx dot patterns were modified at a high temperature (approximate to 800 degrees C), showing hexagonally arranged (dot) and double-hexagonally arranged (pondering) SiOx patterns, respectively. We successfully obtained additional new nanostructures (big-dot, dot-in-honeycomb, line-on-dot, pondering, dot-in-pondering, and line-on-pondering types) through a second self-assembly of cylinder-forming BCPs using the dot and pondering patterns as guiding templates. This simple approach can likely be extended to the multiple self-assembly of many other BCPs with good functionality, significantly contributing to the development of various nanodevices.

Web of Science Categories

Chemistry, Multidisciplinary; Nanoscience & Nanotechnology; Materials Science, Multidisciplinary; Physics, Applied

Funding

Global Frontier Program through the Global Frontier Hybrid Interface Materials (GFHIM) program of the National Research Foundation of Korea (NRF) - Ministry of Science, ICT & Future Planning [2013M3A6B1078874]; Basic Private Research Program of the NRF -

Language

English

attached file